共 50 条
- [1] Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (07):
- [4] Measurement of the linear dimensions of nanorelief elements with a trapezoidal profile by defocusing the electron beam of a scanning electron microscope Measurement Techniques, 2012, 55 : 514 - 518
- [5] Electronic laser beam profile measurement FIFTH CONFERENCE ON OPTICS (ROMOPTO '97), PTS 1 AND 2, 1998, 3405 : 768 - 778
- [6] Beam profile measurement in the presence of noise PROCEEDINGS OF THE 1995 PARTICLE ACCELERATOR CONFERENCE, VOLS 1-5, 1996, : 2572 - 2573
- [8] Surface Profile Measurement Using a Modified Stereo Microscope DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS, 2011, 8133
- [9] LINE-PROFILE MEASUREMENT WITH A SCANNING PROBE MICROSCOPE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2473 - 2476
- [10] Measurement of the parameters of the electron beam of a scanning electron microscope INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING II, 2008, 7042