ELECTRON-BEAM FABRICATION AND FOCUSED ION-BEAM INSPECTION OF SUBMICRON STRUCTURED DIFFRACTIVE OPTICAL-ELEMENTS

被引：12
|
作者：
DIX, C [1 ]
MCKEE, PF [1 ]
THURLOW, AR [1 ]
TOWERS, JR [1 ]
WOOD, DC [1 ]
DAWES, NJ [1 ]
WHITNEY, JT [1 ]
机构：
[1] FEI EUROPE LTD,TWENTYPENCE TOAD,CAMBRIDGE CB4 4PS,ENGLAND
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期
关键词：
D O I：
10.1116/1.587645
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3708 / 3711
页数：4
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