LASER INTERFEROMETER SYSTEM FOR METROLOGY AND MACHINE-TOOL APPLICATIONS

被引：6
|
作者：
WUERZ, LJ
QUENELLE, RC
机构：
来源：
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1983年 / 5卷 / 03期
关键词：
D O I：
10.1016/0141-6359(83)90006-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：111 / 114
页数：4
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