CHARACTERIZATION OF A TI VACUUM-ARC AND THE STRUCTURE OF DEPOSITED TI AND TIN FILMS

被引：48
|
作者：
MARTIN, PJ [1 ]
NETTERFIELD, RP [1 ]
MCKENZIE, DR [1 ]
FALCONER, IS [1 ]
PACEY, CG [1 ]
TOMAS, P [1 ]
SAINTY, WG [1 ]
机构：
[1] UNIV SYDNEY, SCH PHYS, SYDNEY, NSW 2070, AUSTRALIA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1987年 / 5卷 / 01期
关键词：
D O I：
10.1116/1.574132
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：22 / 28
页数：7
相关论文
共 50 条
  • [1] PROPERTIES OF COMPOSITE VACUUM-ARC COATINGS OF THE TiN-Ti/TiON STRUCTURE
    Andreev, A.
    Kostyk, G.
    Sysoiev, Iu
    Minaiev, N.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2018, (01): : 127 - 133
  • [2] Vacuum-arc multilayer nanostructured TiN/Ti coatings: structure, stress state, properties
    Sobol', O. V.
    Andreev, A. A.
    Grigoriev, S. N.
    Volosova, M. A.
    Gorban, V. F.
    METAL SCIENCE AND HEAT TREATMENT, 2012, 54 (1-2) : 28 - 33
  • [3] Vacuum-arc multilayer nanostructured TiN/Ti coatings: structure, stress state, properties
    O. V. Sobol’
    A. A. Andreev
    S. N. Grigoriev
    M. A. Volosova
    V. F. Gorban’
    Metal Science and Heat Treatment, 2012, 54 : 28 - 33
  • [4] STRUCTURE OF FERRITE FILMS DEPOSITED BY VACUUM-ARC DISCHARGE
    NAOE, M
    KIKUCHI, M
    NAGAKURA, S
    YAMANAKA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1967, 6 (06) : 783 - &
  • [5] STRUCTURE AND HARDNESS OF Ti-N AND Ti-Si-N COATINGS DEPOSITED FROM THE FILTERED VACUUM-ARC PLASMA
    Vasil'ev, V. V.
    Luchaninov, A. A.
    Reshetnyak, E. N.
    Strel'nitskij, V. E.
    Tolmatcheva, G. N.
    Reshetnyak, M. V.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2009, (02): : 173 - 180
  • [6] FERRITE FILMS DEPOSITED BY VACUUM-ARC DISCHARGE
    NAOE, M
    KAMIYA, I
    YAMANAKA, S
    ELECTRICAL ENGINEERING IN JAPAN, 1968, 88 (12) : 89 - +
  • [7] Corrosion behavior of the vacuum cathodic arc deposited TiN/Ti coatings
    Xian, XB
    Wang, QF
    Liu, KZ
    Liu, QH
    RARE METAL MATERIALS AND ENGINEERING, 2005, 34 (11) : 1774 - 1777
  • [8] Erosion of Vacuum-Arc Ti–N Coatings
    V. H. Marynin
    Materials Science, 2003, 39 : 447 - 451
  • [9] Structure and properties of Ti-Al-Y-N coatings deposited from filtered vacuum-arc plasma
    Belous, V. A.
    Vasyliev, V. V.
    Goltvyanytsya, V. S.
    Goltvyanytsya, S. K.
    Luchaninov, A. A.
    Reshetnyak, E. N.
    Strel'nitskij, V. E.
    Tolmacheva, G. N.
    Danylina, O.
    SURFACE & COATINGS TECHNOLOGY, 2011, 206 (07): : 1720 - 1726
  • [10] Erosion of vacuum-arc Ti-N coatings
    Marynin, VH
    MATERIALS SCIENCE, 2003, 39 (03) : 447 - 451
12345