THE NONLINEAR EFFECTS IN SPUTTERING OF SOLIDS DUE TO STRAGGLING OF ENERGY-LOSS

被引：8
|
作者：
BITENSKY, IS
机构：
[1] Division of Ion Physics, Department of Radiation Sciences, Uppsala University, S-75121 Uppsala
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 88卷 / 1-2期
关键词：
D O I：
10.1016/0168-583X(94)96082-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The nonlinear effects in sputtering under atomic and molecular ion bombardment are considered taking into account the straggling of primary ion energy deposition near the solid surface. Such consideration is necessary when the mean value of stopping power is not sufficient for a treatment of the spike effects. It is shown that the sputtering yield from a spike region, especially in the case of low energy deposition is not determined by the energy loss alone. The results of the calculations are compared with the experimental data on sputtering of solids under molecule bombardment.
引用
收藏
页码：69 / 73
页数：5
相关论文
共 50 条
  • [1] NONLINEAR ENERGY-LOSS STRAGGLING OF SLOW IONS IN SOLIDS
    ASHLEY, JC
    GRASMARTI, A
    ECHENIQUE, PM
    PHYSICAL REVIEW A, 1986, 34 (03): : 2495 - 2498
  • [2] Energy-loss and straggling of molecular ions moving in solids
    Kaneko, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 115 (1-4): : 43 - 46
  • [3] AN ENERGY-LOSS STRAGGLING FORMULA
    NOVKOVIC, D
    SUBOTIC, K
    MILOSEVIC, Z
    MANIC, S
    STOJANOVIC, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 94 (04): : 369 - 372
  • [4] On the energy-loss straggling of protons in elemental solids: The importance of electron bunching
    Selau, F. F.
    Trombini, H.
    Fadanelli, R. C.
    Vos, M.
    Grande, P. L.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2021, 497 : 70 - 77
  • [5] ENERGY-LOSS AND ENERGY-LOSS STRAGGLING FOR HEAVY-IONS
    LENNARD, WN
    GEISSEL, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 27 (02): : 338 - 343
  • [6] Nonlinear energy-loss straggling of protons and antiprotons in an electron gas
    Wang, NP
    Pitarke, JM
    PHYSICAL REVIEW A, 1998, 57 (05): : 4053 - 4056
  • [7] Energy-loss straggling of helium in elemental solids: The importance of the charge-exchange and bunching effects
    Selau, F. F.
    Molling, A.
    Trombini, H.
    Fadanelli, R. C.
    Vos, M.
    Grande, P. L.
    THIN SOLID FILMS, 2023, 783
  • [8] CHARGE-EXCHANGE EFFECTS IN ENERGY-LOSS STRAGGLING
    SOFIELD, CJ
    COWERN, NEB
    FREEMAN, JM
    NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 221 - 225
  • [9] ENERGY-LOSS STRAGGLING OF PROTONS IN SILICON
    KOLATA, JJ
    AMOS, TM
    BICHSEL, H
    PHYSICAL REVIEW, 1968, 176 (02): : 484 - &
  • [10] ENERGY-LOSS AND ENERGY-LOSS STRAGGLING OF FAST HEAVY-IONS IN MATTER
    GEISSEL, H
    LAICHTER, Y
    SCHNEIDER, WFW
    ARMBRUSTER, P
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3): : 21 - 29
12345