ANALYSIS OF THE ION-BEAM SPUTTERING RATE DISTRIBUTION OVER THE SURFACE OF A SPHERICAL TARGET

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CHUTKO, VM
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SOVIET JOURNAL OF OPTICAL TECHNOLOGY | 1985年 / 52卷 / 08期
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O43 [光学];
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070207 ; 0803 ;
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页码:456 / 459
页数:4
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