FLUORINE CHEMISTRY IN THE MCVD PROCESS

被引：0
|
作者：
CSENCSITS, R [1 ]
WALKER, KL [1 ]
机构：
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源：
AMERICAN CERAMIC SOCIETY BULLETIN | 1982年 / 61卷 / 08期
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D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：822 / 822
页数：1
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