OPTICAL MEASUREMENT METHODS IN THE SEMICONDUCTOR INDUSTRY

被引：0
|
作者：
TERLECKI, G
机构：
来源：
PTB-MITTEILUNGEN | 1984年 / 94卷 / 04期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：239 / 244
页数：6
相关论文
共 50 条
  • [1] Semiconductor industry faces measurement challenge
    Comello, V
    [J]. R&D MAGAZINE, 1998, 40 (01): : 20 - +
  • [2] Comparison and analysis on measurement of optical parameters of some semiconductor films by two methods
    Li, J
    Gan, FX
    [J]. RECENT ADVANCES IN METROLOGY, CHARACTERIZATION, AND STANDARDS FOR OPTICAL DIGITAL DATA DISKS, 1999, 3806 : 169 - 176
  • [3] NUCLEAR ANALYTICAL METHODS IN THE SEMICONDUCTOR INDUSTRY
    KOCH, H
    [J]. ISOTOPENPRAXIS, 1984, 20 (02): : 41 - 47
  • [4] METHODS OF MEASUREMENT - INDUSTRY PERSPECTIVE
    不详
    [J]. COMMUNITY HEALTH STUDIES, 1978, 2 (2-3): : 120 - 122
  • [5] OPTICAL MEASUREMENT METHODS
    JACOBSSON, R
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1976, 66 (02) : 164 - 164
  • [6] OPTICAL MEASUREMENT METHODS
    JONES, R
    [J]. ENGINEERING, 1983, 223 (02): : R1 - R7
  • [7] Will future measurement needs of the semiconductor industry be met?
    Bennett, Herbert S.
    [J]. JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 2007, 112 (01) : 25 - 38
  • [8] A GENERIC VMI MEASUREMENT AND APPLICATION IN THE SEMICONDUCTOR INDUSTRY
    Ehm, Hans
    Jankowiak, Frederic
    Filser, Veronika
    Lauer, Tim
    Anh Nguyen
    [J]. 2018 WINTER SIMULATION CONFERENCE (WSC), 2018, : 3449 - 3460
  • [9] Dispersion Measurement of the Semiconductor Optical Amplifiers
    Wang, Zhi
    Lin, Qing
    Jian, Yangtian
    Liu, Lanlan
    Wu, Chongqing
    [J]. INTERNATIONAL SYMPOSIUM ON PHOTONICS AND OPTOELECTRONICS 2014, 2014, 9233
  • [10] CONFERENCE ON OPTICAL METHODS IN INDUSTRY
    GIVENS, MP
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1952, 42 (08) : 590 - 593
12345