FABRICATION OF THIN PERIODIC STRUCTURES IN PHOTORESIST - EXPERIMENTAL RESULTS

被引：0
|
作者：
AUSTIN, S [1 ]
STONE, FT [1 ]
机构：
[1] POLYTECH INST NEW YORK,DEPT ELECT ENGN,BROOKLYN,NY 11201
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1975年 / 65卷 / 10期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：1223 / 1223
页数：1
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