SOME ASPECTS OF LIQUID-METAL ION SOURCES

被引：6

作者：

MAIR, GLR

MULVEY, T

机构：

来源：

关键词：

D O I：

10.1111/j.1365-2818.1986.tb02756.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：191 / 200

页数：10

共 50 条

[1] LIQUID-METAL ION SOURCES
CZARCZYNSKI, W
ZNAMIROWSKI, Z
VACUUM, 1993, 44 (11-12) : 1095 - 1099
[2] LIQUID-METAL ION SOURCES
BAROFSKY, DF
ACS SYMPOSIUM SERIES, 1985, 291 : 113 - 124
[3] LIQUID-METAL ION SOURCES FOR LITHOGRAPHY - SOME RECENT ADVANCES
PREWETT, PD
MCMILLAN, DJ
JEFFERIES, DK
MAIR, GLR
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 393 : 120 - 128
[4] LIQUID-METAL ION SOURCES AND THEIR APPLICATIONS
MAIR, GLR
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1992, 114 (1-2): : 1 - 21
[5] THE HYDRODYNAMICS OF LIQUID-METAL ION SOURCES
WAGNER, A
APPLIED PHYSICS LETTERS, 1982, 40 (05) : 440 - 442
[6] MODELING OF LIQUID-METAL ION SOURCES
FORBES, RG
LJEPOJEVIC, NN
VACUUM, 1989, 39 (11-12) : 1153 - 1155
[7] ON THE MECHANISM OF LIQUID-METAL ION SOURCES
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KINGHAM, DR
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 41 (03): : 223 - 232
[8] STABILITY OF LIQUID-METAL ION SOURCES
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GORSHKOV, VN
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 46 (02): : 131 - 136
[9] THE WETTABILITY OF LIQUID-METAL ION SOURCES
BOZACK, MJ
SWANSON, LW
BELL, AE
JOURNAL DE PHYSIQUE, 1986, 47 (C-2): : 115 - 120
[10] THE DYNAMICS OF LIQUID-METAL ION SOURCES
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PREWETT, PD
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (11) : 2305 - 2321