METALLIZATION FILMS AND SYSTEMS FOR SEMICONDUCTOR-DEVICES AND CIRCUITS - SOME PROBLEMS AND TRENDS

被引：0

|

作者：

LUBY, S ^{[1
]}

机构：

[1] SLOVAK ACAD SCI,ELECTROPHYS RES CTR,INST PHYS,CS-80936 BRATISLAVA,CZECHOSLOVAKIA

来源：

VACUUM | 1987年 / 37卷 / 1-2期

关键词：

D O I：

10.1016/0042-207X(87)90122-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Semiconductor devices

引用

收藏

页码：190 / 190

页数：1

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