PUMPING OF METHANE BY A LOW-POWER HOT-CATHODE ION-PUMP GAUGE

被引：1

|

作者：

CHAPMAN, R

HOBSON, JP

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573018

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

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页码：476 / 478

页数：3

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