CHEMICALLY AMPLIFIED RESISTS - EFFECT OF POLYMER AND ACID GENERATOR STRUCTURE

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作者：
HOULIHAN, FM
REICHMANIS, E
THOMPSON, LF
TARASCON, RG
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POLYMERS IN MICROLITHOGRAPHY: MATERIALS AND PROCESSES | 1989年 / 412卷
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O69 [应用化学];
学科分类号：
081704 ;
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页码：39 / 56
页数：18
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