RADIOLYSIS OF CF4 IN PRESENCE OF FLUORINE SCAVENGERS

被引:0
|
作者
ILIN, EK
MIGACHEV, AI
机构
关键词
D O I
暂无
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:167 / 168
页数:2
相关论文
共 50 条
  • [1] FLUORINE RELAXATION IN MIXTURES OF CF4 AND OTHER GASES
    MOHANTY, S
    BERNSTEIN, HJ
    JOURNAL OF CHEMICAL PHYSICS, 1971, 54 (09): : 3730 - +
  • [2] ELECTRIC HYPERFINE INTERACTION IN SOLID CF4 AT THE FLUORINE SITE
    BARFUSS, H
    BOHNLEIN, G
    GRADL, G
    HOHENSTEIN, H
    KREISCHE, W
    NIEDRIG, H
    REIMER, A
    JOURNAL OF CHEMICAL PHYSICS, 1982, 76 (10): : 5103 - 5106
  • [3] Quantitative Analysis of Mass Spectrometric Signals for the Estimation of Fluorine Radical Densities in CF4 and CF4/O2 Plasmas
    Jie Li
    Yongjae Kim
    Seunghun Han
    Jingjie Niu
    Heeyeop Chae
    Plasma Chemistry and Plasma Processing, 2022, 42 : 989 - 1002
  • [4] Quantitative Analysis of Mass Spectrometric Signals for the Estimation of Fluorine Radical Densities in CF4 and CF4/O2 Plasmas
    Li, Jie
    Kim, Yongjae
    Han, Seunghun
    Niu, Jingjie
    Chae, Heeyeop
    PLASMA CHEMISTRY AND PLASMA PROCESSING, 2022, 42 (04) : 989 - 1002
  • [5] FLUORINE CORE ESCA LINEWIDTHS IN CH3F AND CF4
    GOSCINSKI, O
    MULLER, J
    POULAIN, E
    SIEGBAHN, H
    CHEMICAL PHYSICS LETTERS, 1978, 55 (03) : 407 - 412
  • [6] Improved fluorine actinometry in a CF4/Ar plasma by estimating argon dilution
    Ruegsegger, S
    Rashap, B
    Freudenberg, J
    PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING, 1997, 97 (09): : 160 - 167
  • [7] Spatial structure of electrons and fluorine atoms in a CF4 RF magnetron plasma
    Ohtsu, Y
    Matsuo, H
    Fujita, H
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (02): : 344 - 348
  • [8] Positron transport in CF4 and N2/CF4 mixtures
    Bankovic, Ana
    Dujko, Sasa
    Marjanovic, Srdjan
    White, Ronald D.
    Petrovic, Zoran Lj.
    EUROPEAN PHYSICAL JOURNAL D, 2014, 68 (05):
  • [9] Positron transport in CF4 and N2/CF4 mixtures
    Ana Banković
    Saša Dujko
    Srdjan Marjanović
    Ronald D. White
    Zoran Lj. Petrović
    The European Physical Journal D, 2014, 68
  • [10] Absolute fluorine atom concentrations in RIE and ECR CF4 plasmas measured by actinometry
    Jenq, Jyh-Shyang
    Ding, Ji
    Taylor, James W.
    Hershkowitz, Noah
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1994, 3 (02):