OXYGEN AND CARBON INCORPORATION DURING INFRARED ASSISTED CZOCHRALSKI GROWTH OF SILICON-CRYSTALS

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作者：

EKHULT, U

CARLBERG, T

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 98卷 / 04期

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D O I：

10.1016/0022-0248(89)90320-5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

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页码：801 / 809

页数：9

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