Investigation of the metrological characteristics of a scanning probe measuring microscope using TGZ type calibration gratings

被引：0
|
作者：
K. V. Gogolinskii
K. L. Gubskii
A. P. Kuznetsov
V. N. Reshetov
I. I. Maslenikov
S. S. Golubev
V. G. Lysenko
S. I. Rumyantsev
机构：
[1] Technological Institute of Superhard and New Carbon Materials,
[2] National Nuclear Research University – Moscow Engineering-Physics Institute (NIYaU MIFI),undefined
[3] Moscow Institute of Physics and Technology (MFTI),undefined
[4] All-Russia Research Institute of Metrological Service (VNIIMS),undefined
来源：
Measurement Techniques | 2012年 / 55卷
关键词：
scanning probe microscope; three-coordinate heterodyne interferometer; topography; nanometer structures; calibration gratings;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The structure and operating principle of the NanoSkan-3Di scanning probe microscope are briefly described. An investigation of the metrological characteristics of this measuring system using linear TGZ-type gratings demonstrated the high level of reproducibility of the measurements and showed that the results agree with the data obtained in a calibration at the PTB (Germany).
引用
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页码：400 / 405
页数：5
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