Current Status of AIST X-ray-Absorption-Spectroscopy (XAFS) Instrument with 100-Pixel Superconducting-Tunnel-Junction Array Detector

We constructed a fluorescence yield X-ray absorption fine structure (XAFS) apparatus for the measurement of local structure around trace light element impurities in light element matrices. Our XAFS instrument with a 100-pixel STJ detector is now in the stage of routine operation and open to users at a synchrotron radiation facility (KEK PF). The average energy resolution of the 100 pixels is 11.8 ±\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\pm $$\end{document} 0.6 at 400 eV in a sensitive area of 1 mm2\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$^{2}$$\end{document}. As an example of functional materials, we successfully measured nitrogen K-edge XAFS spectra of a compound semiconductor, 4H-SiC, with a nitrogen dopant concentration of 300 ppm. The faint N-K line was clearly separated from the strong C-K line.