Development of practical system for laser-induced plasma-assisted ablation (LIPAA) for micromachining of glass materials

被引：0
|
作者：
Y. Hanada
K. Sugioka
Y. Gomi
H. Yamaoka
O. Otsuki
I. Miyamoto
K. Midorikawa
机构：
[1] RIKEN (The Institute of Physical and Chemical Research),Department of Applied Electronics, Faculty of Industrial Science & Technology
[2] Tokyo University of Science,undefined
[3] MARUBUN CORPORATION,undefined
来源：
Applied Physics A | 2004年 / 79卷
关键词：
Microstructure; Pulse Laser; Objective Lens; Optical Component; Practical System;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The laser-induced plasma-assisted ablation (LIPAA) process developed by us, in which only a single conventional pulsed laser is used, makes it possible to perform high-quality and high-speed glass microfabrication. We developed the LIPAA system, which uses the second harmonic of a diode pumped Q-switched Nd:YAG laser, for practical use in industry. The system comprises two optical components, which are the objective lens for high-resolution microfabrication and the galvano mirror type scanner for high-speed patterning of complicated microstructures. In addition to surface microstructuring of the glass, selective metallization of the glass by the LIPAA process, followed by electroless Cu plating, is demonstrated .
引用
收藏
页码：1001 / 1003
页数：2
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