Effect of annealing on the structural, optical and electrical properties of ZnO thin films by spray pyrolysis

被引：31

作者：

Rao T.P. ^{[1
]}

Kumar M.C.S. ^{[1
]}

Ganesan V. ^{[2
]}

机构：

[1] Advanced Materials Laboratory, Department of Physics, National Institute of Technology, Tiruchirappalli-620 015, Tamil Nadu

[2] UGC-DAE Consortium for Scientific Research, Indore-452 001, Madhya Pradesh

来源：

Indian Journal of Physics | 2011年 / 85卷 / 9期

关键词：

Electrical properties; Optical properties; Photoluminescence; Strain; ZnO;

D O I：

10.1007/s12648-011-0160-1

中图分类号：

学科分类号：

摘要：

Zinc oxide thin films have been deposited on glass substrates at a substrate temperature of 673 K by spray pyrolysis. The samples are annealed in ambient atmosphere at various temperatures. The effect of annealing on structural, electrical, and optical properties of ZnO films has been investigated. X-ray diffraction patterns show that crystallinity of the ZnO films has been improved after annealing. The morphology of ZnO thin films is studied by atomic force microscopy. The tensile strain (compressive stress) is found to decrease with increase in annealing temperature which indicates the relaxation of tensile strain in ZnO thin films. A decrease in energy band gap is observed with increase of annealing temperature. The mechanism of blue-green luminescence of ZnO thin film has been analyzed. The resistivity is found to decrease with annealing temperature. © 2011 IACS.

引用

页码：1381 / 1391

页数：10

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