High-Level Fault Modeling in Surface-Micromachined MEMS

被引：0
|
作者：
N. Deb
R. D. (Shawn) Blanton
机构：
[1] Carnegie Mellon University,Department of Electrical and Computer Engineering
来源：
Analog Integrated Circuits and Signal Processing | 2001年 / 29卷
关键词：
MEMS; NODAS; FEA;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
MEMS structures rendered defective by particles are modeled at the schematic-level using existing models of fault-free MEMS primitives within the nodal simulator NODAS. We have compared the results of schematic-level fault simulations with low-level finite element analysis (FEA) and demonstrated the efficacy of such an approach. Analysis shows that NODAS achieves a 60X speedup over FEA with little accuracy loss in modeling defects caused by particles.
引用
收藏
页码：151 / 158
页数：7
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