Enhanced magnetic properties of bit patterned magnetic recording media by trench-filled nanostructure

被引：0
|
作者：
Chulmin Choi
Daehoon Hong
Young Oh
Kunbae Noh
Jin Yeol Kim
Leon Chen
Sy-Hwang Liou
Sungho Jin
机构：
[1] University of California at San Diego,Center for Magnetic Recording Research
[2] University of California at San Diego,Materials Science & Engineering
[3] University of California at San Diego,Mechanical & Aerospace Engineering
[4] University of Nebraska,Department of Physics and Astronomy
来源：
Electronic Materials Letters | 2010年 / 6卷
关键词：
bit patterned media; nano imprint lithography; filling and planarization;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The structure and properties of nanoscale magnetic island arrays for bit patterned media (BPM) have been studied. A periodic Si nano-island array was fabricated by nano-imprint-lithography (NIL), with the trenchfilling and flattening achieved by resist spin coating followed by reactive ion back-etching. A Co/Pd multilayer magnetic media with a perpendicular anisotropy was then sputtered and lifted-off so that the processed nanostructure array now has the magnetic material only on the top of the pillars. This process significantly improved the magnetic characteristics of BPM. A planarization by hydrogen silsesquioxane filling reduced the tribological interference of the protruding nanoisland heights in BPM.
引用
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页码：113 / 116
页数：3
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