Phase composition and structure of boride, nitride, and silicide films produced by ion deposition

被引：0
|
作者：
P. I. Ignatenko
机构：
[1] Donetsk National University,
来源：
Inorganic Materials | 2008年 / 44卷
关键词：
Boride; Boron Atom; Columnar Structure; General Regularity; High Supersaturation;
D O I：
暂无
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学科分类号：
摘要：
We analyze general regularities of structure and phase formation processes in boride, nitride, and silicide films in relation to the energy of atoms condensing on the substrate, substrate material, deposition technique, film growth mechanism, target composition, and deposition temperature.
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