Properties of (001)-textured Pb(Mg1/3Nb2/3)O3–PbTiO3 thin films

被引:0
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作者
Wen Gong
Xiangcheng Chu
Jing-Feng Li
Longtu Li
机构
[1] Tsinghua University,State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engineering
来源
关键词
Ferroelectric; Dielectric; Sol–gel; Thin films; PMN–PT;
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摘要
Relaxor ferroelectric Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN–PT) thin films with [001] preferential orientation were deposited on platinized silicon wafers by a sol–gel method, in which a PbO seeding layer was involved. The influences of annealing temperature on the crystal phase, microstructure, and electrical properties of the PMN–PT films were investigated. Pyrochlore-free perovskite PMN–PT films could be formed on PbO-seeded Pt(111)/Ti/SiO2/Si wafers at 800 °C, which was also the optimal annealing temperature for endowing the film with the best ferroelectric and dielectric properties. The enhanced properties were attributed to the improved crystallinity and microstructure. The leakage behaviors of the PMN–PT films annealed at different temperatures were also measured and discussed.
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页码:672 / 676
页数:4
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