Effect of titanium doping on conductivity, density of states and conduction mechanism in ZnO thin film

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作者
Arifa Jamil
S. Fareed
N. Tiwari
Chuanbo Li
Buwen Cheng
Xiulai Xu
M. A. Rafiq
机构
[1] Institute of Engineering and Applied Sciences (PIEAS),Department of Physics and Applied Mathematics
[2] Nanyang Technological University,School of Materials Science and Engineering
[3] Institute of Engineering and Applied Sciences (PIEAS),Department of Metallurgy and Materials Engineering
[4] Nanyang Technological University (NTU),Energy Research Institute (ERI)
[5] Chinese Academy of Sciences,State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors
[6] Minzu University of China,School of Science
[7] Chinese Academy of Sciences,Beijing National Laboratory for Condensed Matter Physics, Institute of Physics
来源
Applied Physics A | 2019年 / 125卷
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摘要
High quality, ~ 120 nm thin ZnO and Ti-doped ZnO (TZO) films were deposited on silicon substrates using magnetron co-sputtering technique. Surface roughness of the films was ~ 2 nm. Ti incorporation effect on the structure, morphology, conductivity, density of states (DOS) and conduction mechanism was investigated in detail. Ti ions were incorporated in the interstitial sites of hexagonal ZnO lattice. Average crystallite size increased from ~ 16.63 to ~ 19.08 nm upon Ti doping in ZnO film. Conduction mechanism changed from overlapping large polaron tunneling (OLPT) for undoped ZnO film to corelated barrier hopping (CBH) for TZO film. The experimental data were fitted theoretically using OLPT and CBH models to calculate frequency and temperature-dependent DOS. An enhancement of ac conductivity and DOS was observed with the doping of Ti in ZnO thin film. Complex modulus study of TZO film revealed transition from long-range mobility to short-range mobility with increase in frequency.
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