Synchronization of uncertain MEMS resonators via adaptive time-varying terminal sliding mode control

被引：0
|
作者：
Hong-Yi Chen
Kun-Chieh Wang
Hui-Cun Shen
Chi-Hsin Yang
机构：
[1] ZhaoQing University,College of Mechanical and Automotive Engineering
来源：
Microsystem Technologies | 2021年 / 27卷
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摘要：
The main goal of this study addresses the synchronization between two MEMS resonators with cubic and quintic mechanical stiffness under the existence of system uncertainties and external disturbances. The synchronization is obtained by using a novel adaptive time-varying terminal sliding mode control scheme, which includes three time-varying feedback gains can tackle the nonlinear dynamics. Meanwhile, the time-varying feedback gains are updated according to suitable adaptive rules without known bounds of system uncertainties and external disturbances in advance. Based on the Lyapunov stability theory, sufficient conditions to ensure the convergence of the errors between the outputs of master and slave MEMS systems are proven and numerical studies are performed.
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页码：1107 / 1113
页数：6
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