Calibration of atomic force microscopes

被引：1
|
作者：
Novikov Yu.A. [1 ]
Rakov A.V. [1 ]
Todua P.A. [2 ]
机构：
[1] Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow 119991
[2] Center for Surface and Vacuum Research, Moscow 119421
来源：
Bulletin of the Russian Academy of Sciences: Physics | 2009年 / 73卷 / 4期
关键词：
Test Object; Scanning Linearity; Relief Element; Relief Height; Large Inclination Angle;
D O I：
10.3103/S1062873809040030
中图分类号：
学科分类号：
摘要：
Methods for calibrating atomic force microscopes (AFMs) using an AFM signal and its first derivative are discussed. © Allerton Press, Inc. 2009.
引用
收藏
页码：450 / 460
页数：10
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