Comparison of the hardness of TiC/a-C coatings obtained by the method of the magnetron sputtering of a graphite target with high- and low-power pulses

被引：0

作者：

Mamaev A.S. ^{[1
]}

Kaygorodov A.S. ^{[1
]}

机构：

[1] Institute of Electrophysics, Ural Branch, Russian Academy of Science, Yekaterinburg

来源：

Journal of Surface Investigation | 2014年 / 8卷 / 06期

基金：

俄罗斯基础研究基金会;

关键词：

Titanium alloys;

D O I：

10.1134/S102745101406010X

中图分类号：

学科分类号：

摘要：

TiC/a-C coatings 0.1–2.0 μm thick are deposited onto substrates made of (WC + Ti) hard alloy or stainless steel by the method of the pulsed magnetron sputtering of Ti and graphite targets. The microhardness of coatings obtained by the sputtering of a graphite target by pulses of high (∼1 kW/cm2) and low power (∼25 W/cm2) is compared. The effect of the coating thickness on the measured value of the microhardness is investigated. It is shown that maximum values of coating hardness (35 ± 5 GPa) are attained at a Ti/C ratio of 0.6–0.9. © 2014, Pleiades Publishing, Ltd.

引用

页码：1119 / 1123

页数：4

共 10 条

[1] Tribological properties of nc-TiC/a-C:H coatings prepared by magnetron sputtering at low and high ion bombardment of the growing film
Soucek, Pavel
Schmidtova, Tereza
Bursikova, Vilma
Vasina, Petr
Pei, Y. T.
De Hos, J. Th. M.
Caha, Ondrej
Perina, Vratislav
Miksova, Romana
Malinsky, Petr
SURFACE & COATINGS TECHNOLOGY, 2014, 241 : 64 - 73
[2] On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux
Soucek, Pavel
Schmidtova, Tereza
Zabransky, Lukas
Bursikova, Vilma
Vasina, Petr
Caha, Ondrej
Bursik, Jiri
Perina, Vratislav
Miksova, Romana
Pei, Y. T.
De Hosson, J. Th. M.
SURFACE & COATINGS TECHNOLOGY, 2014, 255 : 8 - 14
[3] Effect of an optical emission spectrometer feedback-controlled method on the characterizations of nc-TiC/a-C:H coated by high power impulse magnetron sputtering
Jiang, Xiurong
Yang, Fu-Chi
Lee, Jyh-Wei
Chang, Chi-Lung
DIAMOND AND RELATED MATERIALS, 2017, 73 : 19 - 24
[4] On the formation of nanocomposite TiC/a-C:H coatings by the method of the magnetron sputtering of Ti in an electron-beam activated Ar/C2H2 mixture
Gavrilov N.V.
Kamenetskikh A.S.
Komarskiy A.A.
Murzakaev A.M.
Chukin A.V.
Gavrilov, N.V., 1600, Izdatel'stvo Nauka (08): : 846 - 852
[5] Influences of target power and pulse width on the growth of diamond-like/graphite-like carbon coatings deposited by high power impulse magnetron sputtering
Dai, Wei
Li, Xu
Wu, Liang
Wang, Qimin
Diamond and Related Materials, 2021, 111
[6] Influences of target power and pulse width on the growth of diamond-like/graphite-like carbon coatings deposited by high power impulse magnetron sputtering
Dai, Wei
Li, Xu
Wu, Liang
Wang, Qimin
DIAMOND AND RELATED MATERIALS, 2021, 111
[7] Study of (Ti,Zr)C:H/a-C:H nanocomposite thin film formation by low temperature reactive high power impulse magnetron sputtering
Poltorak, Christian
Stueber, Michael
Leiste, Harald
Bergmaier, Andreas
Ulrich, Sven
SURFACE & COATINGS TECHNOLOGY, 2020, 398 (398):
[8] Effect of TiC grain size on corrosion behaviors of Ti-Si-C nanocomposite coatings fabricated by heterogeneous targets high-power impulse magnetron sputtering
Huang, Xinfang
Liu, Wenyu
Wang, Xiaofeng
Wang, Langping
APPLIED SURFACE SCIENCE, 2024, 672
[9] Structure, Phase Composition, and Hardness of Coatings Obtained by High-Energy Electron Beam Cladding of a Mixture of Cr3C2 and TiC Powders on Low-Carbon Steel
Krylova T.A.
Ivanov K.V.
Ovcharenko V.E.
Inorganic Materials: Applied Research, 2019, 10 (03) : 595 - 599
[10] Achieving ultra-low friction of a-C:H film grown on 9Cr18Mo steel for industrial application via programmable high power pulse magnetron sputtering
Sun, Lei
Jia, Qian
Zhang, Bin
Gao, Kaixiong
Tan, Xin
Lai, Zhenguo
Zhang, Junyan
SURFACE AND INTERFACE ANALYSIS, 2022, 54 (02) : 81 - 91

← 1 →