The Influence of Porosity on the Electromechanical and Pyroelectric Properties of Ca-Modified PbTiO3 Thin Films

被引：0
|
作者：
Andreas Seifert
机构：
[1] Swiss Federal Institute of Technology,Ceramics Laboratory, Materials Department, EPFL
来源：
Journal of Sol-Gel Science and Technology | 1999年 / 16卷
关键词：
Pb; Ca; TiO; thin film; pyroelectric; electromechanical; porosity;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The properties of Pb1-xCaxTiO3 (x = 0–30) thin films for electromechanical and pyroelectric applications can be further improved if porous, low-dielectric constant layers are being used. The electric field dependent strain, piezoelectric coefficient, pyroelectric coefficient and the pyroelectric figure of merit were evaluated as a function of the Ca-content and relative density of the thin films. The heating-rate during the final anneal was observed to be the controlling parameter for the evolution of either dense or porous microstructures. Both 2-methoxyethanol and 1,3-propanediol based solution precursors were used for spin-coating platinized Si3N4/SiO2/Si wafers. Microstructure-property relationships and electrical properties concerning the domain mobility were examined.
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页码：13 / 20
页数：7
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