共 50 条
- [8] Overlay improvement by non-linear error correction and non-linear error control by APC [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XX, PTS 1 AND 2, 2006, 6152
- [10] LINEAR AND NON-LINEAR VISCOELASTICITY OF GLASS [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 42 (1-3) : 185 - 185