Influence of Parameters of Reactive Magnetron Sputtering on Tribomechanical Properties of Protective Nanostructured Ti–Al–N Coatings

被引：0
|
作者：
I. M. Klimovich
F. F. Komarov
V. A. Zaikov
A. K. Kuleshov
V. V. Pilko
机构：
[1] Belarusian State University,
[2] Sevchenko Research Institute of Applied Physics Problems,undefined
来源：
Journal of Friction and Wear | 2018年 / 39卷
关键词：
Ti–Al–N; nanostructured coatings; reactive magnetron sputtering; Rutherford backscattering; scanning electron microscopy; X-Ray diffraction; coefficient of friction; wear;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The influence of substrate temperature and bias voltage on the structure and tribomechanical properties of the Ti–Al–N coatings obtained by reactive magnetron sputtering technique has been investigated. The structure and elemental and phase compositions have been studied by scanning electron microscopy, Rutherford backscattering, and X-Ray diffraction. The results of friction and wear experiments indicated that the lowest coefficient of friction (three times lower than 12Cr18Ni10Ti) corresponded to a coating deposited at a bias voltage of–200 V and a substrate temperature of 340°С, while the most wear-resistant coating (under a load of 700 mN and the testing time of 1080 s) was Ti–Al–N sputtered at a bias voltage of–200 V and a substrate temperature of 440°С.
引用
收藏
页码：92 / 98
页数：6
相关论文
共 50 条
  • [1] Influence of Parameters of Reactive Magnetron Sputtering on Tribomechanical Properties of Protective Nanostructured Ti-Al-N Coatings
    Klimovich, I. M.
    Komarov, F. F.
    Zaikov, V. A.
    Kuleshov, A. K.
    Pilko, V. V.
    JOURNAL OF FRICTION AND WEAR, 2018, 39 (02) : 92 - 98
  • [2] Influence of deposition parameters on the structure and thermal stability of Ti-Al-N coatings produced by reactive magnetron sputtering
    Komarov, F.F.
    Klimovich, I.M.
    Korolik, O.V.
    Zaikov, V.A.
    Lyudchik, O.R.
    High Temperature Material Processes, 2015, 19 (02): : 105 - 112
  • [3] Microstructure and mechanical properties of nanostructured Ti-Al-Si-N coatings deposited by magnetron sputtering
    Miletic, A.
    Panjan, P.
    Skoric, B.
    Cekada, M.
    Drazic, G.
    Kovac, J.
    SURFACE & COATINGS TECHNOLOGY, 2014, 241 : 105 - 111
  • [4] Structure and mechanical properties of (Ti,Al)(B,N) coatings fabricated by reactive DC magnetron sputtering
    Morales-Hernández, J
    García-González, L
    Muñoz-Saldaña, J
    Espinoza-Beltrán, FJ
    VACUUM, 2004, 76 (2-3) : 161 - 164
  • [5] Structure and Properties of Ti–O–N Coatings Produced by Reactive Magnetron Sputtering
    M. E. Konischev
    O. S. Kuzmin
    A. A. Pustovalova
    N. S. Morozova
    K. E. Evdokimov
    R. A. Surmenev
    V. F. Pichugin
    M. Epple
    Russian Physics Journal, 2014, 56 : 1144 - 1149
  • [6] Wear studies of (Ti-Al)N coatings deposited by reactive magnetron sputtering
    Singh, K
    Limaye, PK
    Soni, NL
    Grover, AK
    Agrawal, RG
    Suri, AK
    WEAR, 2005, 258 (11-12) : 1813 - 1824
  • [7] Structure and Properties of Ti-O-N Coatings Produced by Reactive Magnetron Sputtering
    Konischev, M. E.
    Kuzmin, O. S.
    Pustovalova, A. A.
    Morozova, N. S.
    Evdokimov, K. E.
    Surmenev, R. A.
    Pichugin, V. F.
    Epple, M.
    RUSSIAN PHYSICS JOURNAL, 2014, 56 (10) : 1144 - 1149
  • [8] Influence of the Parameters of Middle Frequency Magnetron Sputtering on the Elemental Composition, Microstructure, and Mechanical Properties of Ti-Al-Ta-N Coatings
    Shugurov, A. R.
    Garanin, Yu. A.
    Kuzminov, E. D.
    RUSSIAN PHYSICS JOURNAL, 2024, 67 (04) : 373 - 380
  • [9] Microstructural and mechanical properties of ultra-hard Ti-B-N coatings prepared by reactive magnetron sputtering:: Influence of bias parameters
    Guillon, N
    Héau, C
    Fillit, RY
    SURFACE MODIFICATION TECHNOLOGIES XI, 1998, : 526 - 531
  • [10] Synthesis and annealing effects on the properties of nanostructured Ti-Al-V-N coatings deposited by plasma enhanced magnetron sputtering
    El-Rahman, A. M. Abd
    MATERIALS CHEMISTRY AND PHYSICS, 2015, 149 : 179 - 187
12345