Effect of interference pattern on femtosecond laser-induced ripple structure

Combined structures composed of a micron-sized periodic structure and a nano-sized quasi-periodic ripple structure were generated by a single process of multiple shots of an interfering femtosecond laser. The former structure was generated by an interference pattern and controlled by a number of beams. The latter structure was generated by a multiple shot method. As a result, multiple periodic structures were generated. The periodicity of the structures was analyzed by two-dimensional (2D) fast Fourier transform (FFT). The most probable period of ripple structure was downsized to 177 nm by restricting irradiated region by a TM wave interference pattern. The smallest period was 105 nm. The dispersion angle of a ripple decreased to about 50%. The period and direction of the ripples were for a first time controlled by using interference.