Design and automation of a new versatile UHV plant for very vacuum-sensitive multilayer evaporations

For the fabrication of ultra cold neutron detectors a new deposition plant was purchased and assembled in 2006. It was recently decided to equip the system with a more versatile deposition setup and complement the already existing 7-hearth electron gun with 4 sputter guns and an ion gun. In addition, the entire vacuum system has been automated to facilitate its operation end exclude handling errors. Additionally it is planned to automate the deposition process to render the fabrication of extremely multilayered (several hundred layers) systems possible.