Mixing effect on a nonequilibrium RF induction plasma

被引：0

作者：

H. Nishiyama

Takehiko Sato

S. Ito

Takeshi Sato

S. Kamiyama

机构：

[1] Institute of Fluid Science Tohoku University 2-1-1 Katahira,

[2] Aoba-ku,undefined

[3] Sendai,undefined

[4] 980-8577,undefined

[5] Japan,undefined

[6] Denso Corporation 2-1 Nagane,undefined

[7] Sato-machi Anjo,undefined

[8] Aichi,undefined

[9] 446-0001,undefined

[10] Japan,undefined

[11] Department of Machine Intelligence and System Engineering Faculty of System Science and Engineering Akita Prefectural University 84-4,undefined

[12] Ebinokuchi Tsuchiya,undefined

[13] Honjo,undefined

[14] Akita,undefined

[15] 015-0055,undefined

[16] Japan,undefined

来源：

Heat and Mass Transfer | 2000年 / 36卷

关键词：

Argon; Helium; Temperature Field; Operating Pressure; Injection Location;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

An experimental study was conducted to clarify the effect of secondary gas mixing on the thermo-fluid characteristics of a nonequilibrium RF induction plasma. The premixed argon and helium gas was introduced into a reactor to produce a RF induction plasma in a low operating pressure. It is shown that there are large effects of helium gas injection location and guide length on the plasma luminous area, operating limit of stable plasma, concentration and temperature fields of a RF induction plasma. A visualization study was also conducted to correspond to the variation of plasma configurations by premixing with helium gas.

引用

页码：433 / 437

页数：4

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