Effect of the interface roughness in multilayer systems on x-ray scattering spectra

被引:0
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作者
V. P. Romanov
V. M. Uzdin
S. V. Ul’yanov
机构
[1] St. Petersburg State University,
[2] St. Petersburg Institute of Trade and Economics,undefined
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73.21.Ac; 78.70.Ck;
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摘要
A theoretical approach is proposed for describing x-ray scattering from a layered structure with nonideal interfaces. Specular and diffuse scattering is analyzed with due regard for the longitudinal and transverse spatial correlations of the interface roughnesses and a finite value of the angular aperture. It is demonstrated that the proposed approach provides an adequate explanation for both the experimentally observed broadening of higher order Bragg peaks and the retardation of the decrease in the specular-scattering intensity at large angles.
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页码:353 / 359
页数:6
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