Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1−xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining

被引：0
|
作者：
M. Jilek
T. Cselle
P. Holubar
M. Morstein
M. G. J. Veprek-Heijman
Stan Veprek
机构：
[1] SHM Ltd.,Institute for Chemistry of Inorganic Materials
[2] PLATIT AG,undefined
[3] Technical University Munich,undefined
来源：
Plasma Chemistry and Plasma Processing | 2004年 / 24卷
关键词：
Superhard nanocomposites; industrial applications; (AlTi)N/Si; N; Al–Ti–Si–N; vacuum arc;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The development of novel superhard nanocomposite, nano-layered coatings and of the coating technology based on vacuum arc evaporation from rotating electrodes is summarized. The nc-Al1-xTixN/a-Si3N4 coatings in which the nanocrystals of the Al-rich solid solution with the fcc crystal structure of TiN are imbedded into a thin matrix of amorphous silicon nitride show high thermal stability, oxidation resistance and excellent performance in dry, fast machining that is superior to the state-of-the-art (Ti1-xAlx)N coatings.
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页码：493 / 510
页数：17
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