High-resolution non-destructive three-dimensional imaging of integrated circuits

被引：0
|
作者：
Mirko Holler
Manuel Guizar-Sicairos
Esther H. R. Tsai
Roberto Dinapoli
Elisabeth Müller
Oliver Bunk
Jörg Raabe
Gabriel Aeppli
机构：
[1] Paul Scherrer Institut,Department of Physics
[2] ETH Zürich,undefined
[3] Institut de Physique,undefined
[4] EPFL,undefined
来源：
Nature | 2017年 / 543卷
关键词：
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学科分类号：
摘要：
A recently developed computational imaging technique, X-ray ptychographic tomography, is used to study integrated circuits, and a 3D image of a processor chip with a resolution of 14.6 nm is obtained.
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页码：402 / 406
页数：4
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