A Two-Square Shaped Phononic Crystal Strip for Anchor Quality Factor Enhancement in a Length Extensional Mode TPoS Resonator

被引：0
|
作者：
Thi Dep Ha
机构：
[1] Industrial University of Ho Chi Minh City,
来源：
Journal of Vibration Engineering & Technologies | 2022年 / 10卷
关键词：
Microelectromechanical systems; Thin-film-on-substrate resonator; Phononic crystal; Bandgap; Quality factor; Anchor loss;
D O I：
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学科分类号：
摘要：
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页码：1073 / 1080
页数：7
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    [J]. Applied Physics A, 2021, 127
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    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2021, 127 (10):
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