Mechanical and control characteristics of simple and multilayer nano- and micro-scale piezo motors

被引:0
|
作者
Afonin S.M. [1 ]
机构
[1] Moscow State Institute of Electronic Technology (Technical University), Moscow
关键词
RUSSIAN Engineer Research; Control Characteristic; Voltage Control; Piezo Effect; Parallel Control;
D O I
10.3103/S1068798X11120057
中图分类号
学科分类号
摘要
Statistical and dynamic characteristics of simple and multilayer nano- and micro-scale piezo motors with longitudinal and transverse piezo effects are determined. © 2011 Allerton Press, Inc.
引用
收藏
页码:1165 / 1174
页数:9
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