High-Speed Coplanar Waveguide Based Submount for 40 Gbit/s Electroabsorption Modulator

被引：0
|
作者：
Bing Xiong
Jianbo Tian
Jian Wang
Pengfei Cai
Changzheng Sun
Yi Luo
机构：
[1] Tsinghua University,State Key Lab of Integrated Optoelectronics Department of Electronic Engineering
来源：
International Journal of Infrared and Millimeter Waves | 2005年 / 26卷
关键词：
High-speed submount; Low-Loss Coplanar Waveguide (CPW); Thin-Film Resistor; 40 Gb/s Electroabsorption (EA) Modulator;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A high-speed submount has been designed and fabricated for 40 Gb/s electroabsorption (EA) modulators. The submount contains a coplanar waveguide (CPW) for microwave signal feeding and a Ta2N thin-film resistor for impedance matching. The CPW transmission line is designed to ensure low microwave loss and reflection, and Ti/Cu/Ni/Au metal is adopted for electrode fabrication to guarantee good contact with the Ta2N thin-film. The typical reflection coefficient of fabricated submount is estimated to be lower than−21 dB up to 40 GHz. As a demonstration, a high-speed EA modulator was chip-level packaged using the high-speed submount, and the measured small-signal modulation bandwidth was over 40 GHz.
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页码：1491 / 1500
页数：9
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