Different properties of aluminum doped zinc oxide nanostructured thin films prepared by radio frequency magnetron sputtering

被引：0
|
作者：
Samina Bidmeshkipour
Nasser Shahtahmasebi
机构：
[1] Ferdowsi University of Mashhad,Department of Physics
来源：
Semiconductors | 2013年 / 47卷
关键词：
Aluminum Dope Zinc Oxide; Radio Frequency Magnetron; Aluminium Dope Zinc Oxide Film; Radio Frequency Magnetron Sputtering; Refractive Index Increase;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Aluminium doped zinc oxide (AZO) nanostructured thin films are prepared by radio frequency magnetron sputtering on glass substrate using specifically designed ZnO target containing different amount of Al2O3 powder as the Al doping source. The optical properties of the aluminium doped zinc oxide films are investigated. The topography of the deposited films were investigated by Atomic Force Microscopy. Variation of the refractive index by annealing temperature are considered and it is seen that the refractive index increases by increasing the annealing temperature.
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页码：787 / 790
页数：3
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