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- [7] A New Approach for Sensitivity Improvement of MEMS Capacitive Accelerometer Using Electrostatic Actuation [J]. 2012 SIXTH INTERNATIONAL CONFERENCE ON SENSING TECHNOLOGY (ICST), 2012, : 738 - 742
- [8] A computer aided analysis of a capacitive accelerometer parameters [J]. 2007 PROCEEDINGS OF THE 9TH INTERNATIONAL CONFERENCE ON THE EXPERIENCE OF DESIGNING AND APPLICATION OF CAD SYSTEMS IN MICROELECTRONICS, 2007, : 548 - 550