Parameters improvement and suggestion of new design of capacitive accelerometer

被引:0
|
作者
Zine Ghemari
Salah Saad
机构
[1] University Mohamed Boudiaf- M’sila,Electrical Engineering Department
[2] Badji Mokhtar University,LSELM
关键词
Vibration; Capacitance; Capacitive accelerometer; Damping rate; Sensitivity; Precision;
D O I
暂无
中图分类号
学科分类号
摘要
The capacitance variation of capacitive accelerometer as a function of vibratory movement relative frequency is presented using a developed model validated by simulation and experimental tests. The damping rate effect on accelerometer capacitance variation is studied for four damping rate values. The first value is that of accelerometer used in the experimental tests, the second and third are taken from the recent works and the fourth is the value proposed in this work. A comparative study has been made to mount our improvements on the capacitive accelerometer performances by the comparison between the proposed accelerometers in the recent works. Finally, a new capacitive accelerometer with improved parameters is proposed having many benefits over the existing accelerometers. These benefits are: appropriate choice of damping rate (equal to 0.68), very low measurement error (limited to 0.5%), high accuracy (equal to 99.5%), low consumption of electrical energy and high sensitivity and reliability.
引用
收藏
页码:443 / 451
页数:8
相关论文
共 50 条
  • [1] Parameters improvement and suggestion of new design of capacitive accelerometer
    Ghemari, Zine
    Saad, Salah
    [J]. ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 2017, 92 (03) : 443 - 451
  • [2] Enhancement of capacitive accelerometer operation by parameters improvement
    Ghemari, Zine
    Saad, Salah
    [J]. INTERNATIONAL JOURNAL OF NUMERICAL MODELLING-ELECTRONIC NETWORKS DEVICES AND FIELDS, 2019, 32 (03)
  • [3] Suggestion for a new design of the piezoresistive accelerometer
    Lakehal, Abdelaziz
    Ghemari, Zine
    [J]. FERROELECTRICS, 2016, 493 (01) : 93 - 102
  • [4] Design and fabrication of a new miniaturized capacitive accelerometer
    Liu Shuangfeng
    Ma Tiehua
    Hou Wen
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2008, 147 (01) : 70 - 74
  • [5] On the sensitivity improvement of CMOS capacitive accelerometer
    Sun, Chih-ming
    Wang, ChuanWei
    Fang, Weileun
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2008, 141 (02) : 347 - 352
  • [6] Design and processing experiments of a new miniaturized capacitive triaxial accelerometer
    Puers, R
    Reyntjens, S
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1998, 68 (1-3) : 324 - 328
  • [7] A New Approach for Sensitivity Improvement of MEMS Capacitive Accelerometer Using Electrostatic Actuation
    Mukherjee, Banibrata
    Swamy, K. B. M.
    Sen, Siddhartha
    [J]. 2012 SIXTH INTERNATIONAL CONFERENCE ON SENSING TECHNOLOGY (ICST), 2012, : 738 - 742
  • [8] A computer aided analysis of a capacitive accelerometer parameters
    Teslyuk, Vasyl
    Kushnir, Yuri
    Zaharyuk, Roman
    Pereyma, Mykola
    [J]. 2007 PROCEEDINGS OF THE 9TH INTERNATIONAL CONFERENCE ON THE EXPERIENCE OF DESIGNING AND APPLICATION OF CAD SYSTEMS IN MICROELECTRONICS, 2007, : 548 - 550
  • [9] CAPACITIVE SILICON ACCELEROMETER WITH HIGHLY SYMMETRICAL DESIGN
    SEIDEL, H
    RIEDEL, H
    KOLBECK, R
    MUCK, G
    KUPKE, W
    KONIGER, M
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) : 312 - 315
  • [10] Design of a Capacitive MEMS Accelerometer with Softened Beams
    Wang, Chenggang
    Hao, Yongcun
    Sun, Zheng
    Zu, Luhan
    Yuan, Weizheng
    Chang, Honglong
    [J]. MICROMACHINES, 2022, 13 (03)