Investigation of the Features of High-Intensity Implantation of Nitrogen Ions into Titanium

被引：0
|
作者：
A. I. Ryabchikov
O. S. Korneva
A. I. Ivanova
V. A. Varlachev
A. A. Chernyshev
机构：
[1] National Research Tomsk Polytechnic University,
[2] National Research Tomsk State University,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
ion beam; dopants; implantation; high intensity; repetitively pulsed; surface modification; titanium; nitrogen ions; radiation enhanced diffusion; wide ion-doped layers;
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学科分类号：
摘要：
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页码：S162 / S165
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