A new technique for transparent solid state Li3PO4 electrolyte layer growth: thermionic vacuum arc technique

In this research, a Li3PO4 electrolyte thin film was deposited on glass substrate under high vacuum condition by means of the thermionic vacuum arc (TVA) method. A new deposition mechanism for solid-state battery applications is presented. The physical properties of the produced sample were analyzed with X-ray diffraction device, spectrophotometer, interferometer, scanning electron microscope, and atomic force microscope. In order to understand the surface features of the thin film, AFM analysis was carried out by non-contact mode at ambient condition. The formation of microstructures were monitored clearly by the AFM device. The UV–Vis spectrophotometer result showed that produced film has a high transmittance in the visible region and near infrared region.