Stability study of solution-processed zinc tin oxide thin-film transistors

被引:0
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作者
Xue Zhang
Jean Pierre Ndabakuranye
Dong Wook Kim
Jong Sun Choi
Jaehoon Park
机构
[1] Hallym University,Department of Electronic Engineering
[2] Hongik University,Department of Electrical, Information and Control Engineering
来源
关键词
thin-film transistor; oxide semiconductor; solution process; reliability;
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学科分类号
摘要
In this study, the environmental dependence of the electrical stability of solution-processed n-channel zinc tin oxide (ZTO) thin-film transistors (TFTs) is reported. Under a prolonged negative gate bias stress, a negative shift in threshold voltage occurs in atmospheric air, whereas a negligible positive shift in threshold voltage occurs under vacuum. In the positive bias-stress experiments, a positive shift in threshold voltage was invariably observed both in atmospheric air and under vacuum. In this study, the negative gate-bias-stress-induced instability in atmospheric air is explained through an internal potential in the ZTO semiconductor, which can be generated owing to the interplay between H2O molecules and majority carrier electrons at the surface of the ZTO film. The positive bias-stress-induced instability is ascribed to electron-trapping phenomenon in and around the TFT channel region, which can be further augmented in the presence of air O2 molecules. These results suggest that the interaction between majority carriers and air molecules will have crucial implications for a reliable operation of solution-processed ZTO TFTs.
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页码:964 / 972
页数:8
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