On the Technology of a Laterally Coupled Bragg Grating of Single-Mode Distributed Feedback Laser Diodes

被引：0
|
作者：
R. R. Galiev
A. Yu. Pavlov
N. S. Tarasov
K. N. Tomosh
机构：
[1] Mokerov Institute of Ultra-High Frequency Semiconductor Electronics,
[2] Russian Academy of Sciences,undefined
来源：
Nanobiotechnology Reports | 2022年 / 17卷
关键词：
electron-beam lithography; etching of semiconductors; Bragg grating; distributed feedback; laser diode;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：S31 / S34
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