Influence of silicon crystallographic orientation on mechanical properties of MEMS accelerometers

被引：0
|
作者：
Fedorov M.V. [1 ]
机构：
[1] Gyrooptics, JSC, 14, Chugunnaya ul., St.Petersburg
来源：
Gyroscopy and Navigation | 2012年 / 3卷 / 3期
关键词：
Resonant Frequency; Inertial Mass; Silicon Structure; Algorithmic Compensation; Single Crystalline Silicon;
D O I：
10.1134/S2075108712030066
中图分类号：
学科分类号：
摘要：
The influence of silicon crystallographic orientations (100), (110), (111) on the general properties of micromechanical (MEMS) accelerometers under the effect of operating temperatures is studied. ANSYS software was used to develop MEMS linear and pendulum accelerometers. Dependencies of self-resonant frequencies and scale factors on ambient temperature at different orientations of silicon structure have been determined. © Pleiades Publishing, Ltd., 2012.
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页码：210 / 214
页数：4
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