A heterodyne laser interferometer with digital phase conversion

被引：0
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作者：
V. I. Teleshevskii
S. G. Grishin
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来源：
Measurement Techniques | 2006年 / 49卷
关键词：
heterodyne interferometry; laser measurement system; digital phase detector;
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学科分类号：
摘要：
The structure and metrological properties have been determined for processing with digital logic applicable to a wide range of heterodyne laser interference systems employing digital phase monitoring in the submicrometer and nanometer resolving power ranges.
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页码：545 / 551
页数：6
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