Process windows of ultrasonic thermoforming of micro structures

被引:0
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作者
Yu-Jiang Peng
Werner Karl Schomburg
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[1] RWTH Aachen University,
[2] KEmikro,undefined
来源
Microsystem Technologies | 2020年 / 26卷
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摘要
Ultrasonic thermoforming of micro structures is similar as usual thermoforming, but the heat required for softening of the polymer is at least partly generated by ultrasonic vibrations. Cycle times as short as a few seconds are achieved by ultrasonic thermoforming and not much more than a commercially available ultrasonic welding machine is required for the process. This paper describes the process window of this fabrication process for polypropylene foils, 200 µm in thickness, as a function of preheating of the tool. Best results have been obtained at room temperature. Since the process is a function of temperature, it is concluded that production should be performed with a tool preheated to 45 °C to avoid an influence by a changing room temperature. The overall size of the samples is limited by the size of the available sonotrodes. The experiments described in this paper were performed on an area of 2 × 2 cm2, but larger sonotrodes with an area of, e.g., 8 × 12 cm2 could also be employed. The size of the process window is a function of both the properties of the polymer and the inclination angle of the side walls of the structures on the tools.
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页码:2777 / 2784
页数:7
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