Full Band Monte Carlo Study for Two-Dimensional Hole Transport in Strained Si p-MOSFETs

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作者
Hiroshi Nakatsuji
Yoshinari Kamakura
Kenji Taniguchi
机构
[1] Osaka University,Department of Electronics and Information Systems
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关键词
strained Si; hole mobility; pseudopotential; inversion layer;
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摘要
Transport properties of the two-dimensional hole gas in inversion layer of strained Si/SiGe p-MOSFETs are investigated using the full-band Monte Carlo simulator based on the nonlocal pseudopotential calculation. The hole mobility is significantly enhanced by the strain in the case of Ge content of ≥20%. Moreover, we also present the high-field transport characteristics of 2D holes. In contrast to the low-field mobility, the hole saturation velocity does not significantly enhanced by the strain.
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页码:109 / 112
页数:3
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