Mathematical model of a micromechanical accelerometer with temperature influences, dynamic effects, and the thermoelastic stress-strain state taken into account

被引：1
|
作者：
Barulina M.A. [1 ]
Dzhashitov V.E. [1 ]
Pankratov V.M. [1 ]
Kalinin M.A. [2 ]
Papko A.A. [2 ]
机构：
[1] Institute of Precision Mechanics and Control, RAS, Saratov
[2] Scientific Research Institute for Physical Measurements, Penza
来源：
Gyroscopy and Navigation | 2010年 / 1卷 / 01期
关键词：
MEMS - Thermoelasticity - Finite element method - Electromechanical devices;
D O I：
10.1134/S2075108710010086
中图分类号：
学科分类号：
摘要：
A comprehensive mathematical model of an accelerometer and its basic micromechanical sensing element is constructed that allows us to calculate and analyze the influence of mechanical and temperature effects, and of geometric, electromechanical, and other accelerometer characteristics and parameters, on the outgoing signals of the device with dynamic effects taken into account. The comprehensive model includes interlinked hierarchical mathematical models of the thermal processes of the accelerometer and its micromechanical sensing element, a finite-element model of the thermoelastic stress-strain state of the micromechanical sensing element, and a mathematical model of the dynamic drift due to temperature and deformation fields. Qualitative and quantitative estimates of the parameters of the thermal processes, the stress-strain state, and the drift of the accelerometer are obtained. Recommendations for minimizing drift are elaborated. © Pleiades Publishing, Ltd., 2010.
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页码：52 / 61
页数：9
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